Resumen
Nano-opto-electro-mechanics (NOEMS) is an emerging field with unparalleled prospects for the design
of efficient and low-power devices for ICT. However, to capitalize NOEMS potential, a flexible and
up-scalable technology platform must be established, preferably based on current microelectronic
technology. MAGNIFIC aims at filling this gap focusing on nanocrystalline silicon (nc-Si), only
recently used in NOEMS with very promising results, and its integration with columnar aluminium
nitride. Indeed, while nc-Si is widely used in MEMS production, the dynamics of such an optically
and electrically active nanocrystalline material has barely been investigated, leaving fundamental
gaps in the understanding of the interplay between electrons, phoTons and phoNons. In this context,
we propose an up-scalable, cost efficient, room temperature and Si-compatible
nano-opto-electro-mechanical platform for powering efficient communications technologies. The key
challenge is to achieve a comprehensive understanding of the static and dynamic material properties
and their interdependence. In particular, understanding the role of nano-crystallites and grain
boundaries in absorption and in dissipation mechanisms at the nanoscale is crucial for energy
efficiency and for reliable performance as they are intrinsically linked to losses and variability.
The aimed platform will provide a coherent interface between RF electronics and telecom-wavelength
optics mediated by phoNons, able to provide different functionalities (local oscillation, frequency
conversion, modulation) in highly compact, energy efficient devices. The project starts at TRL3,
achieved via two previous EC projects, and brings the system to TRL5 realizing devices and
circuits, suitably packaged, and environmentally tested with RF frequencies in the 3-12 GHz range.
This will allow to cover a broad variety of ICT applications including pervasive wireless networks
(5G and beyond), smart cities, IoT and satellite communications.
