Structural and optical properties of silicon-rich oxides/nitrides deposited by PECVD

Autores UPV

J.M. Ramirez, Y. Berencén, J. López-Vidrier, O. Blázquez, S. Hernández, B. Garrido, Hurtado Montañés Juan, Sánchez Losilla Nuria, Ivanova Angelova Todora, López Royo Francisco, Sanchis Kilders Pablo

Año

2014

CONGRESO

Structural and optical properties of silicon-rich oxides/nitrides deposited by PECVD