CMOS compatible silicon etched V-grooves integrated with a SOI fiber coupling technique for enhancing fiber-to-chip alignment

Galán Conejos José Vicente, Sanchis Kilders Pablo, Martí Sendra Javier, SEBASTIAN MARX, HENNING SCHRÖDER, B. MUKHOPADHYAY, TOLGA TEKIN, S. SELVARAJA, WIM BOGAERTS, PIETER DUMON, LARS ZIMMERMANN

2009

CMOS compatible silicon etched V-grooves integrated with a SOI fiber coupling technique for enhancing fiber-to-chip alignment